Semiconductor Process Nanopatterning

Semiconductor Process Nanopatterning


Nanosensor Mass Production Technology*

* Collaboration with NNFC (National NanoFab Center)

  • Development of Nanobiosensors
  • Quantitative testing possible with a small sample volume
  • High sensitivity using a nanowell array structure
  • High specificity through biomolecule fixation and reaction control
  • Low cost and high compatibility
Design
Fabrication
Evaluation

Semiconductor-based Electrochemical Nanobiosensor

  • Introduction of Semiconductor Manufacturing Technology
  • Maximize reproducibility by consistently manufacturing microstructures and circuits through high-resolution, high-precision semiconductor processes (NNFC)

  • Using automated semiconductor manufacturing technology to simplify complex processes and reduce costs through mass production. (NNFC)

  • 12-inch wafer process has great advantages in areas requiring high-performance, high-integration circuits, mass production, and cost reduction (NT CREATES)